Lawrence Berkeley National Laboratory has developed a Porcelain-Coated RF Antenna that improves ion and plasma sources used to generate positive, negative or neutral particle beams. When used for ion implantation, it allows the processing of large, irregularly-shaped objects, such as whole engine blocks. It works with corrosive gases, has a much longer life time than conventional sources, and does not require expensive electronics. It does not suffer from sputtering, assuring cleaner plasmas and purer ion implants. The RF antenna has excellent thermal coupling between its hard porcelain enamel coating and water-cooled metal-tube substrate, allowing it to operate at high temperatures for longer periods of time. Since the antenna is cooled it will not cause radiative heating problems in ion implant applications. This cooling also protects the antenna chamber mount. The hard coating prevents unwanted sputtering, ensuring a life span at least ten times as long as standard ion sources. Its non-reactive properties also make it ideal for ion implantation applications with corrosive gases and for continuous operation applications. Due to its sturdy construction it can survive mechanical impacts, heat stress and a hot plasma environment.
Lawrence Berkeley National Laboratory is currently seeking industrial partners to further develop applications for the Porcelain-Coated RF Antenna. Licensing options are available for the manufacture and distribution of this technology for specific and general applications.
Lawrence Berkeley National Laboratory
Technology Transfer Department, Reference #: IB-918
MS 90-1070
Berkeley, CA 94720
Tel: (510) 486-6467 Fax: (510) 486-6457
http://www.lbl.gov/Tech-Transfer/techs/lbnl918.html
Transportation, Environmental, Advanced Materials, Medical, Antennas, Coatings, Porcelain