Award for Excellence in Technology Transfer - 2002

DOE Pacific Northwest National Laboratory

Molecular Beam Epitaxy for Semiconductor Wafer Development pic of Scott Chambers, Bruce Harrer, Don Baer, and Mary Peterson

Semiconductors have had an unprecedented impact on our lives, largely because the industry has steadily delivered exponential increases in performance without an increase in expenditures. That trend is now at risk. Finding and implementing a solution in the quest for cost-effective nanoscale semiconductors has been the mission of a team from PNNL.

The Molecular Beam Epitaxy (MBE) system uses multiple atomic beams to grow well-defined, controlled layers of materials for studying film and interface properties. Advanced MBE technology has the potential to revolutionize semiconductor design and processing through the creation of advanced materials with properties that can be tailored to specific applications.

The PNNL team's technology transfer partner was Motorola Labs. A full range of mechanisms was used to accomplish the transfer, including a user facility agreement, procurement of the system, and a CRADA. As a result of the partnership, Motorola now has an enhanced MBE instrument system and the scientific and technical knowledge to gain maximum benefit from the technology. This system is giving the company a competitive edge by enabling its researchers to solve critical problems in the development of nanoscale components for advanced electronic products and services for industry, consumers, and national defense.

Contact:Mary Peterson
(509) 372-4655
mary.peterson@pnl.gov